JPH0457462B2 - - Google Patents

Info

Publication number
JPH0457462B2
JPH0457462B2 JP60262504A JP26250485A JPH0457462B2 JP H0457462 B2 JPH0457462 B2 JP H0457462B2 JP 60262504 A JP60262504 A JP 60262504A JP 26250485 A JP26250485 A JP 26250485A JP H0457462 B2 JPH0457462 B2 JP H0457462B2
Authority
JP
Japan
Prior art keywords
foreign object
object detection
mirror
light
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60262504A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62124859A (ja
Inventor
Tadao Totsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP60262504A priority Critical patent/JPS62124859A/ja
Publication of JPS62124859A publication Critical patent/JPS62124859A/ja
Publication of JPH0457462B2 publication Critical patent/JPH0457462B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Machine Tool Sensing Apparatuses (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
JP60262504A 1985-11-25 1985-11-25 光学式異物検出装置 Granted JPS62124859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60262504A JPS62124859A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60262504A JPS62124859A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Publications (2)

Publication Number Publication Date
JPS62124859A JPS62124859A (ja) 1987-06-06
JPH0457462B2 true JPH0457462B2 (en]) 1992-09-11

Family

ID=17376719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60262504A Granted JPS62124859A (ja) 1985-11-25 1985-11-25 光学式異物検出装置

Country Status (1)

Country Link
JP (1) JPS62124859A (en])

Also Published As

Publication number Publication date
JPS62124859A (ja) 1987-06-06

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